Effect of structural relaxation at bellow crystallization temperature on internal stress of Ni–Nb–Zr thin film amorphous alloys diaphragm for micro electromechanical systems sensors

Abstract In this paper, the effect of structural relaxation at temperatures below crystallization on internal stress Ni–Nb–Zr thin film amorphous alloy (including metallic glass: TFMG) diaphragms was investigated. We fabiricated diaphragm samples with four compositions. Before fabrication structure by etching, films Si substrate were annealed a temperature (473, 523, and 573 K) for relaxation. By performing bulge tests diaphragms, we able to determine their mechanical properties. As result, Young’s modulus all increased slightly increasing annealing because decrease free volumes during Based results stress, occurred 473 K. Moreover, effects differed They thought be caused rate